An Improved Method to Detect Riblets on Surfaces in Nanometer Scaling Using SEM

E. Reithmeier () and T. Vynnyk
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E. Reithmeier: Institute of Measurement and Automatic Control
T. Vynnyk: Institute of Measurement and Automatic Control

A chapter in From Nano to Space, 2008, pp 43-54 from Springer

Abstract: Abstract An improved photometric method for recording a 3D-microtopogrpahy of technical surfaces will be presented. The suggested procedure employs a scanning electron microscope (SEM) as multi-detector system. The improvement in measurement is based on an extended model of the electron detection in order to evaluate the detectors signals in a different way compared to known approaches. The method will be applied on a calibration sphere in order to demonstrate the accuracy of the current approach.

Keywords: Scanning Electron Microscope Image; Tilt Angle; Vertical Resolution; Primary Electron; High Lateral Resolution (search for similar items in EconPapers)
Date: 2008
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Persistent link: https://EconPapers.repec.org/RePEc:spr:sprchp:978-3-540-74238-8_5

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DOI: 10.1007/978-3-540-74238-8_5

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