A theoretical proposal for a plasma density sensor based on the dielectric substrate antenna with high dielectric constant

Zhen-Hua Zhao, Hai-Feng Zhang, Cai-Xing Hu and Xing-Liang Tian

Journal of Electromagnetic Waves and Applications, 2021, vol. 35, issue 6, 739-753

Abstract: With the rapid development of industrial production and aerospace, how to measure the plasma density has also developed rapidly. So a radio-frequency plasma transducer based on a three-layer dielectric substrate antenna with a high dielectric constant is introduced. The top and bottom layers are dielectric plates, which protect the internal antenna structure and improve the equivalent permittivity of the antenna. The middle layer is the structure layer of the designed antenna. And the antenna size is 3.8 × 2 × 1.8 mm3. When the plasma frequency changes from 0.3 GHz to 7 GHz, the corresponding dielectric substrate antenna resonant frequency (RF) changes from 4.076 to 5.213 GHz. The minimum unit is 0.1 GHz, and all the measurement accuracy is more than 90%. The method based on the effective dielectric constant of plasma will change under different plasma frequencies, so the RF of the antenna is different. In this paper, the radio-frequency plasma transducer is studied theoretically and analyzed numerically.

Date: 2021
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DOI: 10.1080/09205071.2020.1860833

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