Formation and Chemical Selectivity of Partially Ga-Terminated Si(111) Surfaces
Masakazu Ichikawa,
Ken Fujita and
Yukihiro Kusumi
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Masakazu Ichikawa: Joint Research Center for Atom Technology, 1-1-4 Higashi, Tsukuba, Ibaraki 305, Japan
Ken Fujita: Joint Research Center for Atom Technology, 1-1-4 Higashi, Tsukuba, Ibaraki 305, Japan
Yukihiro Kusumi: Joint Research Center for Atom Technology, 1-1-4 Higashi, Tsukuba, Ibaraki 305, Japan
Surface Review and Letters (SRL), 1998, vol. 05, issue 03n04, 665-673
Abstract:
Nanoscale stripes of the Si(111)-(7 × 7) structure with atomic accuracy can be formed on the$(\sqrt{3}\times\sqrt{3})\mbox{-}{\rm Ga}$-terminated Si(111) surface, by selective thermal desorption of Ga atoms from step edges, when the surface is tilted toward the$[\bar{1}\bar{1}2]$direction. The nanoscale stripes of the 7 × 7 structure can also be formed in expected areas by selective thermal desorption of Ga atoms induced by STM stimulation. A Ga-terminated area is found to be chemically less active for adsorption of oxygen, disilane and antimony molecules which selectively react in the 7 × 7 area. By using the chemical selectivity and the nanoscale 7 × 7 stripe for formation method, a stripe pattern with the antimony-adsorbed 7 × 7 areas and$(\sqrt{3}\times\sqrt{3})\mbox{-}{\rm Ga}$areas is produced as a demonstration of nanostructure formation.
Date: 1998
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DOI: 10.1142/S0218625X9800102X
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