OXIDE LAYER FORMED ON THE SURFACE OF OZONE-TREATED InP

Gamal Abdel Fattah ()
Additional contact information
Gamal Abdel Fattah: National Institute of Laser Enhanced Sciences, Cairo University, Giza, Egypt

Surface Review and Letters (SRL), 2001, vol. 08, issue 01n02, 7-9

Abstract: Oxides are formed on InP substrates under UV/ozone illumination. The thickness of the formed oxides increases as the exposure time to the UV source increases, and tends to saturate after three hours of exposure. The optical transmission and X-ray diffraction measurements predict the formation of the oxide layer. X-ray diffraction shows that the oxide film is a mixture ofIn2O3andInPO4and seems to beIn2O3-rich. The integrated absorption coefficient of the formed oxide layer does not depend on the wavelengths in the range of 800–1400 nm, and is found to be in the order of107cm-1. The reflections from the sample surface after UV/ozone oxidation at different exposure times are also measured.

Date: 2001
References: Add references at CitEc
Citations:

Downloads: (external link)
http://www.worldscientific.com/doi/abs/10.1142/S0218625X01000872
Access to full text is restricted to subscribers

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:wsi:srlxxx:v:08:y:2001:i:01n02:n:s0218625x01000872

Ordering information: This journal article can be ordered from

DOI: 10.1142/S0218625X01000872

Access Statistics for this article

Surface Review and Letters (SRL) is currently edited by S Y Tong

More articles in Surface Review and Letters (SRL) from World Scientific Publishing Co. Pte. Ltd.
Bibliographic data for series maintained by Tai Tone Lim ().