STRUCTURAL AND ELECTRICAL PROPERTIES OF DIAMOND-LIKE CARBON THIN FILMS PREPARED IN INERT GAS CONDITION

M. Rusop (), T. Soga, T. Jimbo, M. Umeno and M. Sharon
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M. Rusop: Department of Environmental Technology and Urban Planning, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555, Japan
T. Soga: Department of Environmental Technology and Urban Planning, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555, Japan
T. Jimbo: Department of Environmental Technology and Urban Planning, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555, Japan;
M. Umeno: Department of Environmental Technology and Urban Planning, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555, Japan;
M. Sharon: Department of Environmental Technology and Urban Planning, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555, Japan;

Surface Review and Letters (SRL), 2005, vol. 12, issue 05n06, 691-696

Abstract: The effects of ambient helium gas pressure on the optical, structural and electrical properties of the diamond-like carbon thin films from camphoric carbon soot target, deposited by pulsed laser deposition have been studied. Optical gap and electrical resistivity are found to increase initially at low ambient pressure of 0.008 Torr. With further increase in ambient pressure up to 2.6 Torr, optical gap and electrical resistivity are found to decrease. The films are characterized for their structural properties using different spectroscopic techniques such as, XPS, Raman, and FTIR spectroscopy, and surface morphological techniques like SEM and AFM, and their electrical properties using four-probe resistance measurement.

Keywords: Inert gas; helium; bonding; structural; surface morphology; resistivity (search for similar items in EconPapers)
Date: 2005
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DOI: 10.1142/S0218625X05007712

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