MICROSTRUCTURE AND BLUE PHOTOLUMINESCENCE OF HYDROGENATED SILICON CARBONITRIDE THIN FILMS

Yinqiao Peng, Jicheng Zhou, Guibin Lei, Yuanju Gan and Yuefeng Chen
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Yinqiao Peng: School of Electronics and Information Engineering, GuangDong Ocean University, Zhanjiang 524088, P. R. China
Jicheng Zhou: School of Energy Science and Engineering, Central South University, Changsha 410083, P. R. China
Guibin Lei: Guangdong Province Key Laboratory for Coastal Ocean Variation and Disaster Prediction, GuangDong Ocean University, Zhanjiang 524088, P. R. China
Yuanju Gan: Faculty of Mathematics and Computer Science, GuangDong Ocean University, Zhanjiang 524088, P. R. China
Yuefeng Chen: Faculty of Mathematics and Computer Science, GuangDong Ocean University, Zhanjiang 524088, P. R. China

Surface Review and Letters (SRL), 2019, vol. 26, issue 04, 1-6

Abstract: Hydrogenated silicon carbonitride (SiCN:H) thin films were deposited by sputtering of silicon carbide target in hydrogen-doped argon and nitrogen atmospheres. The properties of the SiCN:H films were analyzed by scanning electron microscopy with energy dispersive spectrometer, atomic force microscope, Fourier transform infrared spectroscopy, X-ray diffraction and fluorescence spectrophotometer. No distinct crystal was formed in the SiCN:H films as-deposited and annealed at 600∘C and 800∘C. The SiCN:H films were mainly composed of Si–N, Si–C, Si–O, C–C, C–N, C≡N, N–Hn bonds and SiCxNy network structure. The strong blue photoluminescence observed from the SiCN:H film annealed at 600∘C was attributed to SiCxNy network structure.

Keywords: Silicon carbonitride; reactive sputtering; microstructure; annealing treatment; blue photoluminescence (search for similar items in EconPapers)
Date: 2019
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DOI: 10.1142/S0218625X18501779

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