THE EFFECT OF IRON ON THE SURFACE GRAPHITIZATION OF SILICON CARBIDE

Elif Mercan and Goknur Cambaz Buke
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Elif Mercan: İ.D. Bilkent University, Faculty of Art, Design & Architecture, Interior Architecture and Environmental Design - Building Science, Turkey
Goknur Cambaz Buke: Department of Materials Science and Nanotechnology Engineering, Micro Nanotechnology Graduate Program, TOBB University of Economics and Technology, Ankara, Turkey

Surface Review and Letters (SRL), 2021, vol. 28, issue 03, 1-5

Abstract: In order to decrease the decomposition temperature of SiC, 12nm Fe thin film is applied on SiC substrates as a catalyst layer using electron beam (e-beam) deposition. To investigate the mechanism of Fe-treated SiC decomposition, local Fe regions are formed through dewetting of the catalyst layer by hydrogen annealing. The results show that Fe decreases the decomposition temperature of SiC effectively and increases the kinetics of the graphitization. Studies showed that depending on the amount of Fe, crumpled and ordered graphene films can be synthesized simultaneously on SiC by using this method.

Keywords: Graphene; silicon carbide; iron; hydrogen; graphitization (search for similar items in EconPapers)
Date: 2021
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DOI: 10.1142/S0218625X21500098

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