Singularly perturbed BVP to estimation of diaphragm deflection in MEMS capacitive microphone: An application of ADM

M.M. Khader and N.H. Sweilam

Applied Mathematics and Computation, 2016, vol. 281, issue C, 214-222

Abstract: In this paper, we implement the Adomian decomposition method (ADM) to approximate the deflection of polysilicon diaphragm with small flexural rigidity of Micro Electro Mechanical System (MEMS) capacitive microphone. We prove the existence and the uniqueness of the solution of considered problem with the help of the theory of semi-group. Special attention is given to prove the convergence of the implemented method. Numerical simulation and comparison between the approximate solutions by using the ADM with the variational iteration method are given.

Keywords: Adomian decomposition method; Analytical solution; Diaphragm deflection; Singular perturbation; Semi-group theory; Capacitive microphone (search for similar items in EconPapers)
Date: 2016
References: View complete reference list from CitEc
Citations: View citations in EconPapers (1)

Downloads: (external link)
http://www.sciencedirect.com/science/article/pii/S0096300316300273
Full text for ScienceDirect subscribers only

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:eee:apmaco:v:281:y:2016:i:c:p:214-222

DOI: 10.1016/j.amc.2016.01.027

Access Statistics for this article

Applied Mathematics and Computation is currently edited by Theodore Simos

More articles in Applied Mathematics and Computation from Elsevier
Bibliographic data for series maintained by Catherine Liu ().