Towards high integration and power density: Zigzag-type thin-film thermoelectric generator assisted by rapid pulse laser patterning technique

Yuedong Yu, Wei Zhu, Yaling Wang, Pengcheng Zhu, Kang Peng and Yuan Deng

Applied Energy, 2020, vol. 275, issue C, No S0306261920309168

Abstract: Cross-plane thin-film thermoelectric generator has become a new hotspot as power supply for microelectronic chips and wearable devices. Nevertheless, the poor incompatibility between thin-film thermoelectric generator with high-density thermoelectric legs and traditional semiconductor processing leads to much difficulty in performance improvement. Herein, a Zigzag-type thermoelectric leg structure is designed assisted by a low-cost rapid pulse laser patterning technique to realize the fabrication of high-density thermoelectric arrays. Furthermore, an investigation of threshold fluences of interaction between laser and materials is conducted to explore the compatibility between pulse laser ablation and thin-film thermoelectric generator fabrication. With the high-property thermoelectric materials achieved by high temperature treatment, the high-density integrated thin-film thermoelectric generator presents a power density of 1.04 mW cm−2 at a temperature difference of 88 K. This high output makes it an excellent micro power source to drive a variety of devices for a self-power system. Moreover, a detailed analysis about the additional thermal resistance is carried out to provide a guide for the practical application.

Keywords: Thin-film thermoelectric generator; Cross-plane structure; Pulse laser ablation; Additional thermal resistance; Thermal contact resistance (search for similar items in EconPapers)
Date: 2020
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Citations: View citations in EconPapers (3)

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DOI: 10.1016/j.apenergy.2020.115404

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