Chaotic dynamic and control for micro-electro-mechanical systems of massive storage with harmonic base excitation

Manuel F. Pérez Polo, Manuel Pérez Molina and Javier Gil Chica

Chaos, Solitons & Fractals, 2009, vol. 39, issue 3, 1356-1370

Abstract: This paper explores chaotic behaviour and control of micro-electro-mechanical systems (MEMS), which consist of thousands of small read/write probe tips that access gigabytes of data stored in a non-volatile magnetic surface. The model of the system is formed by two masses connected by a nonlinear spring and a viscous damping. The paper shows that, by means of an adequate feedback law, the masses can behave as two coupled Duffing’s oscillators, which may reach chaotic behaviour when harmonic forces are applied. The chaotic motion is destroyed by applying the following control strategies: (i) static output feedback control law with constant forces and (ii) geometric nonlinear control. The aim is to drive the masses to a set point even with harmonic base excitation, by using chaotic dynamics and nonlinear control. The paper shows that it is possible to obtain a positioning time around a few ms with sub-nanometre accuracy, velocities, accelerations and forces, as it appears in the design of present MEMS devices. Numerical simulations are used to verify the mathematical discussions.

Date: 2009
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Persistent link: https://EconPapers.repec.org/RePEc:eee:chsofr:v:39:y:2009:i:3:p:1356-1370

DOI: 10.1016/j.chaos.2007.06.010

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