A bounded-error approach to accuracy analysis in ellipsometry

M.K. Smit and J.W. Verhoof

Mathematics and Computers in Simulation (MATCOM), 1990, vol. 32, issue 5, 545-551

Abstract: A nonlinear Bounded-Error Estimation method is applied to the case of ellipsometric measurement of film properties. It is shown that this method can be used with advantage for estimating the magnitude of the measurement errors including systematic errors.

Date: 1990
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Persistent link: https://EconPapers.repec.org/RePEc:eee:matcom:v:32:y:1990:i:5:p:545-551

DOI: 10.1016/0378-4754(90)90010-G

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