Spectroscopic transmission ellipsometry studies of semiconductor heterostructures

K.B. Ozanyan and O. Hunderi

Physica A: Statistical Mechanics and its Applications, 1994, vol. 207, issue 1, 420-426

Abstract: Ellipsometry is conventionally used in a reflection configuration, which however is not suitable for the case of p-polarization sensitive modes in high-index samples. In this paper we demonstrate that transmission ellipsometry at the Brewster angle of incidence can be a powerful tool for investigating heterostructures and superlattices, provided s-polarized absorption is negligible. Such a geometry combines the possibility of achieving a greater p-polarized component in the sample, the convinience of measuring at higher signal levels and easier treatment of experimental data.

Date: 1994
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Persistent link: https://EconPapers.repec.org/RePEc:eee:phsmap:v:207:y:1994:i:1:p:420-426

DOI: 10.1016/0378-4371(94)90404-9

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