Preparation of A1/A1N cermet film by co-sputtering; structural aspects and optical properties

S. Berthier, S. Fagnent, L. Sauques, M.C. Sainte Catherine and C. Sella

Physica A: Statistical Mechanics and its Applications, 1997, vol. 241, issue 1, 138-145

Abstract: Aluminum/aluminiu nitride (A1/A1N) cerment films have been deposited by radio-frequency cosputtering. Determination of percolation threshold qc = 0.22 was derived from microstructural analysis and conductivity measurements. SIMS measurements also revealed inhomogeneities of atomic composition versus depth profile. Optical properties have been reported both in the mid-infrared and partly visible range. Comparison with a model using multilayer-films and Bruggeman model have been made. In the end, the influence of surface roughness on reflectance behaviour is also discussed. For more details, an article on Al-A1N microstructure will be published in a forthcoming paper.

Keywords: Aluminium nitride; Aluminium; Cerment; Structural properties; Electrical and optical properties (search for similar items in EconPapers)
Date: 1997
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Persistent link: https://EconPapers.repec.org/RePEc:eee:phsmap:v:241:y:1997:i:1:p:138-145

DOI: 10.1016/S0378-4371(97)00073-3

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