Microstructure and growth mechanism of Pt Al2O3 co-sputtered nanocermet films studied by SAXS, TEM and AFM

C. Sella, M. Mâaza, B. Pardo, F. Dunsteter, J.C. Martin and M.C. Sainte Catherine

Physica A: Statistical Mechanics and its Applications, 1997, vol. 241, issue 1, 192-198

Abstract: The physical properties of nanocermets are related mostly to their morphology. In this contribution, we present the microstructural and morphological evolution of co-sputtered Pt Al2O3 granular films with thickness, metal concentration and thermal annealing. These investigations are achieved by grazing angle X-ray reflectometry, transmission electron microscopy and atomic force microscopy. The experimental results show that (i) the diameter of platinum clusters increases as a function of film thickness, annealing temperature and metal concentration and (ii) a columnar growth is observed whose morphology also depends on the previous parameters and on the growth direction.

Keywords: Cermet films; Microstructure; Growth; Low-angle X-ray scattering; Transmission electron microscopy; Atomic force microscopy (search for similar items in EconPapers)
Date: 1997
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Persistent link: https://EconPapers.repec.org/RePEc:eee:phsmap:v:241:y:1997:i:1:p:192-198

DOI: 10.1016/S0378-4371(97)00082-4

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