Basic mechanisms for hillock formation during etching

D.A. Mirabella, M.P. Suárez and C.M. Aldao

Physica A: Statistical Mechanics and its Applications, 2008, vol. 387, issue 8, 1957-1962

Abstract: The formation of etch hillocks was explored in the framework of a site-dependent detachment probabilities model. Monte Carlo simulations were carried out for a one-dimensional substrate within a restricted solid-on-solid model in which only first neighbour interactions are considered. We specifically focus on describing the dynamics that lead to hillock-and-valley patterns. The mechanisms responsible for the steady state morphologies were related to apex creation and annihilation, together with valley and hillock etching, but pattern formation reflects two feedback loops that interrelate these mechanisms.

Keywords: Solid surfaces; Structure and morphology; Etching; Patterning (search for similar items in EconPapers)
Date: 2008
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Citations: View citations in EconPapers (1)

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Persistent link: https://EconPapers.repec.org/RePEc:eee:phsmap:v:387:y:2008:i:8:p:1957-1962

DOI: 10.1016/j.physa.2007.11.028

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