Capacity planning for cluster tools in the semiconductor industry

Martin Romauch and Richard F. Hartl

International Journal of Production Economics, 2017, vol. 194, issue C, 167-180

Abstract: This paper proposes a new model for cluster tools with two load locks. Cluster tools are widely used to automate single wafer processing in semiconductor industry. The load locks are the entry points into the vacuum of the cluster tool’s mainframe. Usually there are two of them available. Each lot being processed is dedicated to a single load-lock. Therefore at most two different lots (with possibly different processing times and qualification) can be processed simultaneously. This restriction is one of the major potential bottlenecks.

Keywords: Cluster tool; Capacity planning; Semiconductor industry; Linear programming; Duality (search for similar items in EconPapers)
Date: 2017
References: View references in EconPapers View complete reference list from CitEc
Citations: View citations in EconPapers (2)

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Persistent link: https://EconPapers.repec.org/RePEc:eee:proeco:v:194:y:2017:i:c:p:167-180

DOI: 10.1016/j.ijpe.2017.01.005

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