Development of a four-in-one sensor for low temperature fuel cell

Chi-Yuan Lee, Jyun-Ting Lin, Chia-Hung Chen, Shuo-Jen Lee and Yu-Syuan Wang

Renewable Energy, 2019, vol. 135, issue C, 1452-1465

Abstract: By using micro-electro-mechanical systems (MEMS), this work develops flexible four-in-one (temperature, voltage, current and flow) micro sensors on a flexible substrate. The flexible four-in-one micro sensors use polyimide as the protective layer, owing to its high temperature resistance.

Keywords: MEMS; Flexible four-in-one micro sensor; Thermal shock testing; Reliability testing; Durability testing (search for similar items in EconPapers)
Date: 2019
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Persistent link: https://EconPapers.repec.org/RePEc:eee:renene:v:135:y:2019:i:c:p:1452-1465

DOI: 10.1016/j.renene.2018.09.075

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