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FT-IR and XPS analysis of a-Si1-xGex:H thin films

M.N. Makadsi, M.F.A. Alias, A.A. Essa and H.R. AI-Azawi

Renewable Energy, 2003, vol. 28, issue 6, 975-984

Abstract: Silicon–Germanium alloys have been prepared in an evacuated fused silica tube, and by thermal evaporation amorphous Si1-xGex:H thin films were deposited at different preparation conditions such as deposition temperature (Td), dopant concentration of aluminum (Al) and arsenic (As) and Ge content (x). Fourior transform infrared (FT-IR) investigations showed the existence of all the expected stretching and bending modes of (Si-H)n and (Ge-H)n. The X-ray photoemission spectroscopy (XPS) exhibited the existence of oxygen:carbon and hydrogen atoms on the Si-Ge surface which led to a shift in Si-2p and Ge-3p core level for pure and doped a-Si1-xGex:H thin films with aluminum and arsenic.

Date: 2003
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Persistent link: https://EconPapers.repec.org/RePEc:eee:renene:v:28:y:2003:i:6:p:975-984

DOI: 10.1016/S0960-1481(02)00061-7

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