Effect of the Cu underlayer on the optoelectrical properties of ITO/Cu thin films

J.H. Chae and Daeil Kim

Renewable Energy, 2010, vol. 35, issue 1, 314-317

Abstract: Sn doped indium oxide (ITO) single layer films and ITO/Copper (Cu) bi-layer films were prepared on polycarbonate substrates by DC and RF magnetron sputtering without intentional substrate heating. In order to consider the influence of the Cu underlayer on the optoelectrical properties and microstructures of the films, the thickness of the Cu bottom layer in the ITO/Cu films was varied from 5 to 20nm.

Keywords: ITO; Copper; Magnetron sputtering; Optical properties; Resistivity (search for similar items in EconPapers)
Date: 2010
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Citations: View citations in EconPapers (1)

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Persistent link: https://EconPapers.repec.org/RePEc:eee:renene:v:35:y:2010:i:1:p:314-317

DOI: 10.1016/j.renene.2009.05.017

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