The effects of post-deposition annealing on the microstructure of electron-beam evaporated indium tin oxide thin films

A.S.A.C. Diniz, C.J. Kiely, I. Elfalla, R.D. Pilkington and A.E. Hill

Renewable Energy, 1994, vol. 5, issue 1, 209-211

Abstract: ITO thin films have been produced by electron beam evaporation and submitted to a post-deposition annealing to study the effect of heat treatments on the optoelectronic characteristics of the films. The electrical and optical characteristics of the ITO thin films after annealing showed that high quality material can be prepared reproducibly with the transmission being largely controlled by annealing step in air and the electrical properties being improved by a subsequent anneal under a reducing atmosphere. In this paper we will report Transmission Electron Microscopy and X-Ray Diffraction results on the microstructural evolution of the ITO films at each stage of fabrication process. These will be correlated with the electrical and optical characteristics of the films at each corresponding stage.

Date: 1994
References: View complete reference list from CitEc
Citations: View citations in EconPapers (1)

Downloads: (external link)
http://www.sciencedirect.com/science/article/pii/0960148194903735
Full text for ScienceDirect subscribers only

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:eee:renene:v:5:y:1994:i:1:p:209-211

DOI: 10.1016/0960-1481(94)90373-5

Access Statistics for this article

Renewable Energy is currently edited by Soteris A. Kalogirou and Paul Christodoulides

More articles in Renewable Energy from Elsevier
Bibliographic data for series maintained by Catherine Liu ().