Finer features for functional microdevices

Satoshi Kawata (), Hong-Bo Sun, Tomokazu Tanaka and Kenji Takada
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Satoshi Kawata: Osaka University
Hong-Bo Sun: Osaka University
Tomokazu Tanaka: Osaka University
Kenji Takada: Osaka University

Nature, 2001, vol. 412, issue 6848, 697-698

Abstract: Micromachines can be created with higher resolution using two-photon absorption.

Date: 2001
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DOI: 10.1038/35089130

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