Imprints offer Moore

R. Fabian Pease ()
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R. Fabian Pease: Stanford University

Nature, 2002, vol. 417, issue 6891, 802-803

Abstract: The cost of making chip components smaller using photolithographic printing might soon invalidate Moore's law. A new imprinting technique that can reproduce features as small as 10 nm could save it.

Date: 2002
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DOI: 10.1038/417802a

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