Achromatic Fresnel optics for wideband extreme-ultraviolet and X-ray imaging

Yuxin Wang, Wenbing Yun () and Chris Jacobsen
Additional contact information
Yuxin Wang: Xradia, Inc.
Wenbing Yun: Xradia, Inc.
Chris Jacobsen: Xradia, Inc.

Nature, 2003, vol. 424, issue 6944, 50-53

Abstract: Abstract Advances in extreme-ultraviolet (EUV) and X-ray optics are providing powerful new capabilities in high-resolution imaging and trace-element analysis of microscopic specimens1, and the potential for fabricating devices of smaller critical dimensions in next-generation integrated circuit lithography2. However, achieving the highest resolution with such optics usually requires the illuminating EUV or X-ray beam to be highly monochromatic. It would therefore be highly desirable to have large-field-of-view, sub-100-nm resolution optics that are achromatic to a significant degree, allowing more light to be utilized from broader bandwidth sources such as laser-produced plasmas. Here we report an achromatic Fresnel optical system for EUV or X-ray radiation that combines a Fresnel zone plate with a refractive lens with opposite chromatic aberration. We use the large anomalous dispersion property of the refractive lens material near an absorption edge to make its fabrication practical. The resulting structure can deliver a resolution comparable to that of the Fresnel zone plates that have achieved the highest resolution (25 nm; ref. 3) in the entire electromagnetic spectrum, but with an improvement of two or more orders of magnitude in spectral bandwidth.

Date: 2003
References: Add references at CitEc
Citations: View citations in EconPapers (2)

Downloads: (external link)
https://www.nature.com/articles/nature01756 Abstract (text/html)
Access to the full text of the articles in this series is restricted.

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:nat:nature:v:424:y:2003:i:6944:d:10.1038_nature01756

Ordering information: This journal article can be ordered from
https://www.nature.com/

DOI: 10.1038/nature01756

Access Statistics for this article

Nature is currently edited by Magdalena Skipper

More articles in Nature from Nature
Bibliographic data for series maintained by Sonal Shukla () and Springer Nature Abstracting and Indexing ().