Soft X-ray microscopy at a spatial resolution better than 15 nm

Weilun Chao (), Bruce D. Harteneck, J. Alexander Liddle, Erik H. Anderson and David T. Attwood
Additional contact information
Weilun Chao: Lawrence Berkeley National Laboratory,
Bruce D. Harteneck: Lawrence Berkeley National Laboratory,
J. Alexander Liddle: Lawrence Berkeley National Laboratory,
Erik H. Anderson: Lawrence Berkeley National Laboratory,
David T. Attwood: Lawrence Berkeley National Laboratory,

Nature, 2005, vol. 435, issue 7046, 1210-1213

Abstract: X-ray nanomicroscopy The study of nanostructures is creating a need for microscopes that can see beyond the limits of conventional visible light and ultraviolet microscopes. X-ray imaging is a promising option. A new microscope described this week achieves unprecedented resolution, and has the ability to see through containing material. It features a specially made two-component zone plate — a lens with concentric zones rather like the rings in the Fresnel lenses familiar in overhead projectors and elsewhere — that makes use of diffraction to project an image into a CCD camera sensitive to soft X-rays. Spatial resolution of better than 15 nm is possible.

Date: 2005
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DOI: 10.1038/nature03719

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