Element-selective imaging of atomic columns in a crystal using STEM and EELS
Koji Kimoto (),
Toru Asaka,
Takuro Nagai,
Mitsuhiro Saito,
Yoshio Matsui and
Kazuo Ishizuka
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Koji Kimoto: National Institute for Materials Science, Tsukuba, Ibaraki 305-0044, Japan
Toru Asaka: National Institute for Materials Science, Tsukuba, Ibaraki 305-0044, Japan
Takuro Nagai: National Institute for Materials Science, Tsukuba, Ibaraki 305-0044, Japan
Mitsuhiro Saito: National Institute for Materials Science, Tsukuba, Ibaraki 305-0044, Japan
Yoshio Matsui: National Institute for Materials Science, Tsukuba, Ibaraki 305-0044, Japan
Kazuo Ishizuka: National Institute for Materials Science, Tsukuba, Ibaraki 305-0044, Japan
Nature, 2007, vol. 450, issue 7170, 702-704
Abstract:
Atom-level microscopy Microstructure characterization is important for the study of complex materials. For example, semiconductor devices consist of nanometre-sized components, and their performance depends on the atomic microstructure. Although the electron microscope can resolve individual atoms, it cannot distinguish their chemical type. A combination of scanning transmission electron microscopy (STEM) and electron energy-loss spectroscopy (EELS) should be capable of analysing the chemical composition of individual atomic columns, but practical difficulties have meant that full two-dimensional analysis has not been possible. Now some of the problems have been overcome, and STEM/EELS imaging has been used to visualize the atomic columns of lanthanum, manganese and oxygen in the layered manganite La1.2Sr1.8Mn2O7 as a two-dimensional image.
Date: 2007
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DOI: 10.1038/nature06352
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