Atom-by-atom structural and chemical analysis by annular dark-field electron microscopy

Ondrej L. Krivanek (), Matthew F. Chisholm, Valeria Nicolosi, Timothy J. Pennycook, George J. Corbin, Niklas Dellby, Matthew F. Murfitt, Christopher S. Own, Zoltan S. Szilagyi, Mark P. Oxley, Sokrates T. Pantelides and Stephen J. Pennycook
Additional contact information
Ondrej L. Krivanek: Nion Co., 1102 8th Street, Kirkland, Washington 98033, USA
Matthew F. Chisholm: Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6069, USA
Valeria Nicolosi: University of Oxford, Parks Road, Oxford OX1 3PH, UK
Timothy J. Pennycook: Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6069, USA
George J. Corbin: Nion Co., 1102 8th Street, Kirkland, Washington 98033, USA
Niklas Dellby: Nion Co., 1102 8th Street, Kirkland, Washington 98033, USA
Matthew F. Murfitt: Nion Co., 1102 8th Street, Kirkland, Washington 98033, USA
Christopher S. Own: Nion Co., 1102 8th Street, Kirkland, Washington 98033, USA
Zoltan S. Szilagyi: Nion Co., 1102 8th Street, Kirkland, Washington 98033, USA
Mark P. Oxley: Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6069, USA
Sokrates T. Pantelides: Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6069, USA
Stephen J. Pennycook: Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6069, USA

Nature, 2010, vol. 464, issue 7288, 571-574

Abstract: Elemental mapping atom-by-atom An imaging technique able to resolve and identify all individual atoms in non-periodic solids would be a very useful tool for materials analysis. Annular dark-field (ADF) imaging in an aberration-corrected scanning transmission electron microscope optimized for low voltage operation allows such an analysis, as shown by Ondrej Krivanek and co-workers. The technique was used to examine a monolayer of boron nitride, in which it revealed individual atomic substitutions involving carbon and oxygen impurity atoms. Careful analysis of the data enables the construction of a detailed map of the atomic structure, with all the atoms of the four species resolved and identified.

Date: 2010
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DOI: 10.1038/nature08879

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