Patterning by controlled cracking

Koo Hyun Nam (), Il H. Park and Seung Hwan Ko ()
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Koo Hyun Nam: Research Center of MEMS Space Telescope, Ewha Womans University, Daehyun-dong 11-1, Seodaemun-gu, Seoul 120-750, South Korea
Il H. Park: Research Center of MEMS Space Telescope, Ewha Womans University, Daehyun-dong 11-1, Seodaemun-gu, Seoul 120-750, South Korea
Seung Hwan Ko: Applied Nano Technology and Science Lab, Korea Advanced Institute of Science and Technology, 335 Daehak-ro, Yusong-Gu, Daejeon 305-701, South Korea

Nature, 2012, vol. 485, issue 7397, 221-224

Abstract: Propagating cracks—normally associated with material failure and viewed as undesirable—can be controlled in a film/substrate system, opening up new possibilities for nanofabrication and atomic-scale patterning.

Date: 2012
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DOI: 10.1038/nature11002

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