High-resolution non-destructive three-dimensional imaging of integrated circuits

Mirko Holler (), Manuel Guizar-Sicairos, Esther H. R. Tsai, Roberto Dinapoli, Elisabeth Müller, Oliver Bunk, Jörg Raabe and Gabriel Aeppli
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Mirko Holler: Paul Scherrer Institut
Manuel Guizar-Sicairos: Paul Scherrer Institut
Esther H. R. Tsai: Paul Scherrer Institut
Roberto Dinapoli: Paul Scherrer Institut
Elisabeth Müller: Paul Scherrer Institut
Oliver Bunk: Paul Scherrer Institut
Jörg Raabe: Paul Scherrer Institut
Gabriel Aeppli: Paul Scherrer Institut

Nature, 2017, vol. 543, issue 7645, 402-406

Abstract: A recently developed computational imaging technique, X-ray ptychographic tomography, is used to study integrated circuits, and a 3D image of a processor chip with a resolution of 14.6 nm is obtained.

Date: 2017
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DOI: 10.1038/nature21698

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