Heterogeneous integration of single-crystalline complex-oxide membranes

Hyun S. Kum, Hyungwoo Lee, Sungkyu Kim, Shane Lindemann, Wei Kong, Kuan Qiao, Peng Chen, Julian Irwin, June Hyuk Lee, Saien Xie, Shruti Subramanian, Jaewoo Shim, Sang-Hoon Bae, Chanyeol Choi, Luigi Ranno, Seungju Seo, Sangho Lee, Jackson Bauer, Huashan Li, Kyusang Lee, Joshua A. Robinson, Caroline A. Ross, Darrell G. Schlom, Mark S. Rzchowski, Chang-Beom Eom () and Jeehwan Kim ()
Additional contact information
Hyun S. Kum: Massachusetts Institute of Technology
Hyungwoo Lee: University of Wisconsin-Madison
Sungkyu Kim: Massachusetts Institute of Technology
Shane Lindemann: University of Wisconsin-Madison
Wei Kong: Massachusetts Institute of Technology
Kuan Qiao: Massachusetts Institute of Technology
Peng Chen: Massachusetts Institute of Technology
Julian Irwin: University of Wisconsin-Madison
June Hyuk Lee: Korea Atomic Energy Research Institute
Saien Xie: Cornell University
Shruti Subramanian: The Pennsylvania State University
Jaewoo Shim: Massachusetts Institute of Technology
Sang-Hoon Bae: Massachusetts Institute of Technology
Chanyeol Choi: Massachusetts Institute of Technology
Luigi Ranno: Massachusetts Institute of Technology
Seungju Seo: Massachusetts Institute of Technology
Sangho Lee: Massachusetts Institute of Technology
Jackson Bauer: Massachusetts Institute of Technology
Huashan Li: Sino-French Institute for Nuclear Energy and Technology, Sun Yat-Sen University
Kyusang Lee: University of Virginia
Joshua A. Robinson: The Pennsylvania State University
Caroline A. Ross: Massachusetts Institute of Technology
Darrell G. Schlom: Cornell University
Mark S. Rzchowski: University of Wisconsin-Madison
Chang-Beom Eom: University of Wisconsin-Madison
Jeehwan Kim: Massachusetts Institute of Technology

Nature, 2020, vol. 578, issue 7793, 75-81

Abstract: Abstract Complex-oxide materials exhibit a vast range of functional properties desirable for next-generation electronic, spintronic, magnetoelectric, neuromorphic, and energy conversion storage devices1–4. Their physical functionalities can be coupled by stacking layers of such materials to create heterostructures and can be further boosted by applying strain5–7. The predominant method for heterogeneous integration and application of strain has been through heteroepitaxy, which drastically limits the possible material combinations and the ability to integrate complex oxides with mature semiconductor technologies. Moreover, key physical properties of complex-oxide thin films, such as piezoelectricity and magnetostriction, are severely reduced by the substrate clamping effect. Here we demonstrate a universal mechanical exfoliation method of producing freestanding single-crystalline membranes made from a wide range of complex-oxide materials including perovskite, spinel and garnet crystal structures with varying crystallographic orientations. In addition, we create artificial heterostructures and hybridize their physical properties by directly stacking such freestanding membranes with different crystal structures and orientations, which is not possible using conventional methods. Our results establish a platform for stacking and coupling three-dimensional structures, akin to two-dimensional material-based heterostructures, for enhancing device functionalities8,9.

Date: 2020
References: Add references at CitEc
Citations: View citations in EconPapers (9)

Downloads: (external link)
https://www.nature.com/articles/s41586-020-1939-z Abstract (text/html)
Access to the full text of the articles in this series is restricted.

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:nat:nature:v:578:y:2020:i:7793:d:10.1038_s41586-020-1939-z

Ordering information: This journal article can be ordered from
https://www.nature.com/

DOI: 10.1038/s41586-020-1939-z

Access Statistics for this article

Nature is currently edited by Magdalena Skipper

More articles in Nature from Nature
Bibliographic data for series maintained by Sonal Shukla () and Springer Nature Abstracting and Indexing ().