Vertical full-colour micro-LEDs via 2D materials-based layer transfer

Jiho Shin, Hyunseok Kim, Suresh Sundaram, Junseok Jeong, Bo-In Park, Celesta S. Chang, Joonghoon Choi, Taemin Kim, Mayuran Saravanapavanantham, Kuangye Lu, Sungkyu Kim, Jun Min Suh, Ki Seok Kim, Min-Kyu Song, Yunpeng Liu, Kuan Qiao, Jae Hwan Kim, Yeongin Kim, Ji-Hoon Kang, Jekyung Kim, Doeon Lee, Jaeyong Lee, Justin S. Kim, Han Eol Lee, Hanwool Yeon, Hyun S. Kum, Sang-Hoon Bae, Vladimir Bulovic, Ki Jun Yu, Kyusang Lee (), Kwanghun Chung (), Young Joon Hong (), Abdallah Ougazzaden () and Jeehwan Kim ()
Additional contact information
Jiho Shin: Massachusetts Institute of Technology
Hyunseok Kim: Massachusetts Institute of Technology
Suresh Sundaram: CNRS, IRL 2958, GT−CNRS, Georgia Tech-Lorraine
Junseok Jeong: Massachusetts Institute of Technology
Bo-In Park: Massachusetts Institute of Technology
Celesta S. Chang: Massachusetts Institute of Technology
Joonghoon Choi: Sejong University
Taemin Kim: Yonsei University
Mayuran Saravanapavanantham: Massachusetts Institute of Technology
Kuangye Lu: Massachusetts Institute of Technology
Sungkyu Kim: Massachusetts Institute of Technology
Jun Min Suh: Massachusetts Institute of Technology
Ki Seok Kim: Massachusetts Institute of Technology
Min-Kyu Song: Massachusetts Institute of Technology
Yunpeng Liu: Massachusetts Institute of Technology
Kuan Qiao: Massachusetts Institute of Technology
Jae Hwan Kim: Massachusetts Institute of Technology
Yeongin Kim: Massachusetts Institute of Technology
Ji-Hoon Kang: Massachusetts Institute of Technology
Jekyung Kim: Massachusetts Institute of Technology
Doeon Lee: University of Virginia
Jaeyong Lee: Massachusetts Institute of Technology
Justin S. Kim: Washington University in Saint Louis
Han Eol Lee: Massachusetts Institute of Technology
Hanwool Yeon: Massachusetts Institute of Technology
Hyun S. Kum: Massachusetts Institute of Technology
Sang-Hoon Bae: Massachusetts Institute of Technology
Vladimir Bulovic: Massachusetts Institute of Technology
Ki Jun Yu: Yonsei University
Kyusang Lee: University of Virginia
Kwanghun Chung: Massachusetts Institute of Technology
Young Joon Hong: Sejong University
Abdallah Ougazzaden: CNRS, IRL 2958, GT−CNRS, Georgia Tech-Lorraine
Jeehwan Kim: Massachusetts Institute of Technology

Nature, 2023, vol. 614, issue 7946, 81-87

Abstract: Abstract Micro-LEDs (µLEDs) have been explored for augmented and virtual reality display applications that require extremely high pixels per inch and luminance1,2. However, conventional manufacturing processes based on the lateral assembly of red, green and blue (RGB) µLEDs have limitations in enhancing pixel density3–6. Recent demonstrations of vertical µLED displays have attempted to address this issue by stacking freestanding RGB LED membranes and fabricating top-down7–14, but minimization of the lateral dimensions of stacked µLEDs has been difficult. Here we report full-colour, vertically stacked µLEDs that achieve, to our knowledge, the highest array density (5,100 pixels per inch) and the smallest size (4 µm) reported to date. This is enabled by a two-dimensional materials-based layer transfer technique15–18 that allows the growth of RGB LEDs of near-submicron thickness on two-dimensional material-coated substrates via remote or van der Waals epitaxy, mechanical release and stacking of LEDs, followed by top-down fabrication. The smallest-ever stack height of around 9 µm is the key enabler for record high µLED array density. We also demonstrate vertical integration of blue µLEDs with silicon membrane transistors for active matrix operation. These results establish routes to creating full-colour µLED displays for augmented and virtual reality, while also offering a generalizable platform for broader classes of three-dimensional integrated devices.

Date: 2023
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DOI: 10.1038/s41586-022-05612-1

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