Microchip minutiae imaged using rapid X-ray bursts

Tais Gorkhover () and Daniela Rupp ()

Nature, 2024, vol. 632, issue 8023, 36-38

Abstract: As components on a computer chip shrink, their structure becomes ever-more complicated to image. A method that uses bursts of X-rays offers high-resolution, rapid-fire visualization down to single-transistor level.

Keywords: Imaging; Optics and photonics; Physics (search for similar items in EconPapers)
Date: 2024
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DOI: 10.1038/d41586-024-02377-7

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