Scalable production of ultraflat and ultraflexible diamond membrane

Jixiang Jing, Fuqiang Sun, Zhongqiang Wang, Linjie Ma, Yumeng Luo, Zhiyuan Du, Tianyu Zhang, Yicheng Wang, Feng Xu, Tongtong Zhang, Changsheng Chen, Xuhang Ma, Yang He, Ye Zhu, Huarui Sun, Xinqiang Wang, Yan Zhou, James Kit Hon Tsoi, Jörg Wrachtrup, Ngai Wong, Can Li, Dong-Keun Ki, Qi Wang (), Kwai Hei Li (), Yuan Lin () and Zhiqin Chu ()
Additional contact information
Jixiang Jing: The University of Hong Kong
Fuqiang Sun: The University of Hong Kong
Zhongqiang Wang: Peking University
Linjie Ma: The University of Hong Kong
Yumeng Luo: Southern University of Science and Technology
Zhiyuan Du: The University of Hong Kong
Tianyu Zhang: The University of Hong Kong
Yicheng Wang: The University of Hong Kong
Feng Xu: The University of Hong Kong
Tongtong Zhang: The University of Hong Kong
Changsheng Chen: The Hong Kong Polytechnic University
Xuhang Ma: Southern University of Science and Technology
Yang He: Harbin Institute of Technology
Ye Zhu: The Hong Kong Polytechnic University
Huarui Sun: Harbin Institute of Technology
Xinqiang Wang: Peking University
Yan Zhou: The Chinese University of Hong Kong
James Kit Hon Tsoi: The University of Hong Kong
Jörg Wrachtrup: University of Stuttgart
Ngai Wong: The University of Hong Kong
Can Li: The University of Hong Kong
Dong-Keun Ki: The University of Hong Kong
Qi Wang: Peking University
Kwai Hei Li: Southern University of Science and Technology
Yuan Lin: The University of Hong Kong
Zhiqin Chu: The University of Hong Kong

Nature, 2024, vol. 636, issue 8043, 627-634

Abstract: Abstract Diamond is an exceptional material with great potential across various fields owing to its interesting properties1,2. However, despite extensive efforts over the past decades3–5, producing large quantities of desired ultrathin diamond membranes for widespread use remains challenging. Here we demonstrate that edge-exposed exfoliation using sticky tape is a simple, scalable and reliable method for producing ultrathin and transferable polycrystalline diamond membranes. Our approach enables the mass production of large-area (2-inch wafer), ultrathin (sub-micrometre thickness), ultraflat (sub-nano surface roughness) and ultraflexible (360° bendable) diamond membranes. These high-quality membranes, which have a flat workable surface, support standard micromanufacturing techniques, and their ultraflexible nature allows for direct elastic strain engineering and deformation sensing applications, which is not possible with their bulky counterpart. Systematic experimental and theoretical studies reveal that the quality of the exfoliated membranes depends on the peeling angle and membrane thickness, for which largely intact diamond membranes can be robustly produced within an optimal operation window. This single-step method, which opens up new avenues for the mass production of high-figure-of-merit diamond membranes, is expected to accelerate the commercialization and arrival of the diamond era in electronics, photonics and other related fields.

Date: 2024
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DOI: 10.1038/s41586-024-08218-x

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