Smith–EWMA run-to-run control schemes for a process with measurement delay

Ming Jin and Fugee Tsung

IISE Transactions, 2009, vol. 41, issue 4, 346-358

Abstract: The Exponentially Weighted Moving Average (EWMA) controller is a popular run-to-run controller in the semiconductor manufacturing industry. The controller adjusts input based on measurement information from previous runs. EWMA controllers can guarantee satisfactory results in many cases; however, when there is a measurement delay in the process, the stability properties and performance of the EWMA controller cannot be guaranteed. In order to maintain the satisfactory outcomes of EWMA controllers, a Smith predictor control scheme is introduced, created particularly for time delay systems in control theory, into EWMA controllers. A modification of the EWMA controller, called the Smith–EWMA run-to-run controller, is proposed. Comparisons between the stability properties of Smith–EWMA and EWMA run-to-run controllers are studied. Moreover, a performance comparison with the EWMA and recursive-least-square controllers under disturbance conditions based on simulation is conducted. The results show that when there is a measurement delay, the proposed Smith–EWMA run-to-run controllers enlarge the stability region and also achieve better performance when there is serious metrology delay and model uncertainty under process disturbances.[Supplementary materials are available for this article. Go to the publisher's online edition of IIE Transactions for the following free supplemental resource: Appendix]

Date: 2009
References: Add references at CitEc
Citations: View citations in EconPapers (1)

Downloads: (external link)
http://hdl.handle.net/10.1080/07408170802331243 (text/html)
Access to full text is restricted to subscribers.

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:taf:uiiexx:v:41:y:2009:i:4:p:346-358

Ordering information: This journal article can be ordered from
http://www.tandfonline.com/pricing/journal/uiie20

DOI: 10.1080/07408170802331243

Access Statistics for this article

IISE Transactions is currently edited by Jianjun Shi

More articles in IISE Transactions from Taylor & Francis Journals
Bibliographic data for series maintained by Chris Longhurst ().