Modified EWMA controller subject to metrology delay

Chien-Hua Lin, Sheng-Tsaing Tseng and Hsiang-Fan Wang

IISE Transactions, 2013, vol. 45, issue 4, 409-421

Abstract: The resource and capacity limitations of the metrology equipment used in the creation of integrated circuits result in delay being a common issue for the practical implementation of run-to-run control scheme. In the literature, several papers have provided the means of using metrology delay data or Virtual Metrology (VM) prediction models on the transient behavior and asymptotic stability of Exponentially Weighted Moving Average (EWMA) controllers. However, these procedures still suffer from large bias and/or variation of the process response variable. To overcome this difficulty, a modified EWMA controller is proposed that adjusts the process by using both the metrology delay data and VM information. The analytical expression of the process output of this developed controller and its long-term stability along with short-term output performance are derived. Furthermore, under some specific parameter settings, a more comprehensive study is presented to illustrate that the proposed controller has the capability to reduce the total mean square error of process response variable compared with existing controllers.[Supplementary materials are available for this article. Go to the publisher's online edition of IIE Transactions for the Appendices to this article.]

Date: 2013
References: Add references at CitEc
Citations: View citations in EconPapers (1)

Downloads: (external link)
http://hdl.handle.net/10.1080/0740817X.2012.689242 (text/html)
Access to full text is restricted to subscribers.

Related works:
This item may be available elsewhere in EconPapers: Search for items with the same title.

Export reference: BibTeX RIS (EndNote, ProCite, RefMan) HTML/Text

Persistent link: https://EconPapers.repec.org/RePEc:taf:uiiexx:v:45:y:2013:i:4:p:409-421

Ordering information: This journal article can be ordered from
http://www.tandfonline.com/pricing/journal/uiie20

DOI: 10.1080/0740817X.2012.689242

Access Statistics for this article

IISE Transactions is currently edited by Jianjun Shi

More articles in IISE Transactions from Taylor & Francis Journals
Bibliographic data for series maintained by Chris Longhurst ().