N 2 O emission and reduction in the electronics manufacturing industries

Seung‐Jae Lee, In‐Soo Ryu and Seung‐Hyun Moon

Greenhouse Gases: Science and Technology, 2012, vol. 2, issue 5, 380-385

Abstract: Electronics manufacturing industries have rapidly developed in South Korea. To reduce the use of fluorinated gases having high global warming potential (GWP) in their processes, companies have recently attempted to replace these gases with nitrous oxide (N 2 O). Unfortunately, N 2 O itself has a GWP of 310 and is one of the main greenhouse gases. The electronics manufacturing industries should therefore consider reducing N 2 O emissions from their processes. This study measured the N 2 O emission from a large display manufacturing plant in South Korea and investigated the removal of N 2 O at the site of the plant by either a catalytic decomposition process or a reduction process. We suggest a hybrid N 2 O reduction process to effectively reduce the N 2 O emissions of the electronics manufacturing industries. © 2012 Society of Chemical Industry and John Wiley & Sons, Ltd

Date: 2012
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Persistent link: https://EconPapers.repec.org/RePEc:wly:greenh:v:2:y:2012:i:5:p:380-385

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