Statistical Methods Applied to a Semiconductor Manufacturing Process

Takeshi Koyama ()
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Takeshi Koyama: Tokushima Bunri University, Faculty of Engineering

A chapter in Frontiers in Statistical Quality Control 8, 2006, pp 332-341 from Springer

Abstract: 5 Summary Statistical methods applied to semiconductor manufacturing process are normally viewed. An example with L16(215) orthogonal array is presented including split-unit design and estimation of one missing value. The result of this experiment was extraordinarily effective to improve the yield beyond expectation. Dynamic and statistical characteristics about consuming time in the manufacturing process are studied by computer simulation, in particular, under the condition that the working time is larger than arrival time interval with gamma random variables. The study will be useful to assure quality in manufacturing process for preventing quality deterioration in accordance with time.

Keywords: Orthogonal Array; Finish Time; Batch Product; Erlang Distribution; Accelerate Life Test (search for similar items in EconPapers)
Date: 2006
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Persistent link: https://EconPapers.repec.org/RePEc:spr:sprchp:978-3-7908-1687-7_20

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DOI: 10.1007/3-7908-1687-6_20

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