Simplified process flow for the fabrication of PERC solar cells with ion implanted emitter

Gence Bektaş, Gamze Kökbudak, Ahmet Emin Keçeci, Sümeyye Koçak Bütüner, Hasan Asav, Emine Hande Çiftpınar, Hasan Hüseyin Canar, Bülent Arıkan and Raşit Turan

Renewable Energy, 2021, vol. 179, issue C, 2295-2299

Abstract: Ion implanted PERC cells have already achieved power conversion efficiencies of about 20.0%. The process flows reported in the literature for the ion implanted PERC cells with commonly utilized Al2O3/SiNx rear passivation stack, which has the benefit of being less sensitive to surface roughness than SiO2/SiNx stack passivation, notably suffer from the additional process steps such as single side polishing and single side protection. Here, we present a simplified process flow for the fabrication of ion implanted PERC cells having Al2O3/SiNx stack passivation at the textured rear surface without any rear side processing, leading to a power conversion efficiency of 20% at large area. In this context, we show the sensitivity of solar cell efficiency to firing peak temperature, implantation dose, and Al2O3 thickness. The results of the present research will provide a basis for high efficiency implanted PERC cells with significantly reduced workload and cost.

Keywords: Ion implantation; Phosphorus emitter; PERC solar cell; Al2O3/SiNx rear passivation stack; Firing temperature; Simplified process flow (search for similar items in EconPapers)
Date: 2021
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Persistent link: https://EconPapers.repec.org/RePEc:eee:renene:v:179:y:2021:i:c:p:2295-2299

DOI: 10.1016/j.renene.2021.08.054

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