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Transparent conductive Sn-doped indium oxide thin films deposited by spray pyrolysis technique

S.M. Rozati and T. Ganj

Renewable Energy, 2004, vol. 29, issue 10, 1671-1676

Abstract: Films of indium oxide doped with tin (ITO) are prepared using the low cost spray pyrolysis technique. The effect of tin doping on the physical properties of In2O3 are studied. In this study the polycrystalline ITO films with the different Sn concentration of 1 to 100-wt% SnCl2 were prepared on Corning 7059 glass substrate. These films were confirmed to show the high crystallinity by X-ray diffraction technique. Low sheet resistance (25Ω/■) and high visible transmission (~82%) were obtained when the films were deposited at the tin concentration of 2-wt%.

Keywords: In2O3: Sn; Spray pyrolysis; Transparent conducting oxide (search for similar items in EconPapers)
Date: 2004
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Persistent link: https://EconPapers.repec.org/RePEc:eee:renene:v:29:y:2004:i:10:p:1671-1676

DOI: 10.1016/j.renene.2004.01.008

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