Allocation of geometrical errors for developing precision measurement machine

Tao Lai, Junfeng Liu (), Fulei Chen (), Zelong Li, Chaoliang Guan, Huang Li, Chao Xu, Hao Hu, Yifan Dai, Shanyong Chen and Zhongxiang Dai
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Tao Lai: National University of Defense Technology
Junfeng Liu: National University of Defense Technology
Fulei Chen: National University of Defense Technology
Zelong Li: National University of Defense Technology
Chaoliang Guan: National University of Defense Technology
Huang Li: National University of Defense Technology
Chao Xu: National University of Defense Technology
Hao Hu: National University of Defense Technology
Yifan Dai: National University of Defense Technology
Shanyong Chen: National University of Defense Technology
Zhongxiang Dai: National University of Defense Technology

Journal of Intelligent Manufacturing, 2025, vol. 36, issue 6, No 21, 4105-4127

Abstract: Abstract A high-precision measurement machine tool faces the challenge of correlating the overall motion accuracy with the components form and positional accuracy. This study presents an innovative method for addressing this issue in ultra-precision measuring machines. A geometric error model based on multibody theory, and a weight model are established to predict measurement results and correlate overall motion accuracy with individual component accuracy. To validate the model, a target overall motion accuracy of 100 nm is set and the all the individual components accuracy is calculated by the geometric error weights derived from the proposed model. By fabricating a critical component, the linear guideway, to meet specific individual accuracies and incorporating it in an ultra-precise measurement machine, the study demonstrates achieving the individual accuracies with the magnetorheological polishing. Finally, the overall motion accuracy is validated by a cross test among the designed machine, DUI profilometer, and Zygo interferometer. By measuring a same optical surface, the measurement results show the surface PV differences better than 100 nm. The results demonstrate the validation of the correlation between overall motion accuracy and component accuracy established by the method described in this paper. In conclusion, this study offers an accurate design solution for determining overall motion and individual accuracies, enabling high accuracy in intelligent manufacturing equipment.

Keywords: Accuracy allocation; Geometrical error; Measurement machine; Multibody model; Manufacturing accuracy (search for similar items in EconPapers)
Date: 2025
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DOI: 10.1007/s10845-024-02440-0

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