Finite Element Method for Dielectric Reliability

Cher Ming Tan (), Zhenghao Gan (), Wei Li () and Yuejin Hou ()
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Cher Ming Tan: Nanyang Technological University
Zhenghao Gan: Semiconductor Manufacturing International (Shanghai) Corp.
Wei Li: Singapore Institute of Manufacturing Technology
Yuejin Hou: Nanyang Technological University

Chapter Chapter 6 in Applications of Finite Element Methods for Reliability Studies on ULSI Interconnections, 2011, pp 131-145 from Springer

Abstract: Abstract The effective dielectric constant (K eff ) is a concept to characterize the integrated working permittivity of a structure consisting of various dielectrics of different dielectric constants.

Keywords: High Electric Field; Electric Field Distribution; Local Electric Field; Electric Field Vector; Effective Dielectric Constant (search for similar items in EconPapers)
Date: 2011
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Persistent link: https://EconPapers.repec.org/RePEc:spr:ssrchp:978-0-85729-310-7_6

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DOI: 10.1007/978-0-85729-310-7_6

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